MPCVD systems operate under harsh conditions—over 1200°C, reactive plasma erosion, and ultra-high vacuum—placing strict demands on spare part materials. Molybdenum, tungsten alloys, and high-purity graphite enable stable operation via unique properties. Our MPCVD parts, made from these premium materials, set a new performance and durability benchmark.
Material Properties and Segmented Application Scenarios
Material traits are critical for extreme-condition adaptability, with each substrate offering irreplaceable advantages for specific components.
Molybdenum: Ideal for High-Temperature Load-Bearing Components
Molybdenum (2620°C melting point, 138 W/m·K thermal conductivity) suits substrate stages and susceptors. Our ≥99.95% high-purity molybdenum parts reduce contamination, ensuring uniform diamond film deposition for electronic-grade production.
Tungsten Alloys: Reliable for Microwave Transmission Components
Tungsten alloys, with excellent plasma corrosion resistance, serve microwave waveguides. They retain stability in long-term 2.45GHz coupling, ensuring non-stop operation and less downtime.
High-Purity Graphite: Versatile for Plasma Chamber Components
High-purity graphite (≥99.9%) has ultra-low thermal expansion (1.0×10⁻⁶/°C, 20-200°C) and chemical stability, ideal for chamber liners and insulation. It meets ≤5×10⁻⁶ Torr vacuum needs (low outgassing) and is recyclable, balancing performance and cost.
Material Process Upgrades Drive Spare Parts Performance Iteration
We upgrade materials via purification/modification, extending service life and cutting maintenance costs.
Lanthanum Doping Modification for Molybdenum-Based Parts
Our molybdenum parts use La doping to boost strength and high-temperature stability, extending service life by 30% vs. conventional versions.
High-Temperature CVD Preparation for High-Purity Graphite Parts
High-temperature CVD reduces graphite porosity to <5%, minimizing plasma penetration/wear for stable performance and lower downtime costs.
Backed by premium materials and innovation, our MPCVD parts redefine industry performance. They support high-precision tasks (e.g., electronic-grade diamonds). Choose us for top-tier materials and technology.
